{
"Summary": {
  "Slices": 31,
  "InitialPositionList": [
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -5028.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -5028.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -5028.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -5028.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -5028.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -4749.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -4749.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -4749.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -4749.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -4749.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -4471
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -4471
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -4471
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -4471
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -4471
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -4192.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -4192.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -4192.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -4192.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -4192.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -3913.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -3913.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -3913.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -3913.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -3913.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          933.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          933.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          933.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          933.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          933.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          1212.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          1212.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          1212.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          1212.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          1212.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          1491
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          1491
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          1491
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          1491
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          1491
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          1769.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          1769.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          1769.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          1769.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          1769.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          2048.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          2048.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          2048.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          2048.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          2048.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          19329.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          19329.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          19329.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          19329.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          19329.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          19608.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          19608.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          19608.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          19608.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          19608.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          19887
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          19887
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          19887
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          19887
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          19887
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          20165.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          20165.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          20165.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          20165.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          20165.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          20444.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          20444.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          20444.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          20444.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          20444.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          26393.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          26393.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          26393.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          26393.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          26393.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          26672.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          26672.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          26672.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          26672.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          26672.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          26951
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          26951
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          26951
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          26951
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          26951
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          27229.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          27229.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          27229.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          27229.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          27229.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          27508.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          27508.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          27508.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          27508.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          27508.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          27725.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          27725.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          27725.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          27725.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          27725.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28004.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28004.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28004.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28004.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28004.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28283
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28283
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28283
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28283
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28283
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28561.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28561.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28561.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28561.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28561.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28840.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28840.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28840.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28840.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28840.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          21470.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          21470.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          21470.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          21470.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          21470.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          21749.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          21749.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          21749.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          21749.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          21749.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          22028
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          22028
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          22028
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          22028
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          22028
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          22306.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          22306.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          22306.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          22306.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          22306.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          22585.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          22585.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          22585.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          22585.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          22585.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          3179.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          3179.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          3179.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          3179.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          3179.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          3458.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          3458.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          3458.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          3458.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          3458.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          3737
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          3737
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          3737
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          3737
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          3737
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          4015.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          4015.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          4015.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          4015.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          4015.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          4294.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          4294.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          4294.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          4294.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          4294.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -2228.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -2228.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -2228.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -2228.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -2228.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1949.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1949.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1949.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1949.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1949.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1671
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1671
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1671
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1671
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1671
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1392.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1392.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1392.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1392.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1392.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1113.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1113.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1113.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1113.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1113.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -5758.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -5758.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -5758.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -5758.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -5758.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -5479.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -5479.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -5479.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -5479.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -5479.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -5201
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -5201
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -5201
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -5201
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -5201
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -4922.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -4922.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -4922.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -4922.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -4922.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -4643.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -4643.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -4643.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -4643.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -4643.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          95.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          95.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          95.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          95.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          95.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          374.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          374.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          374.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          374.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          374.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          653
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          653
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          653
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          653
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          653
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          931.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          931.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          931.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          931.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          931.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          1210.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          1210.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          1210.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          1210.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          1210.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          19586.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          19586.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          19586.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          19586.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          19586.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          19865.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          19865.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          19865.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          19865.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          19865.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          20144
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          20144
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          20144
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          20144
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          20144
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          20422.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          20422.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          20422.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          20422.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          20422.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          20701.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          20701.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          20701.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          20701.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          20701.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          24663.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          24663.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          24663.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          24663.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          24663.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          24942.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          24942.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          24942.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          24942.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          24942.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          25221
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          25221
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          25221
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          25221
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          25221
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          25499.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          25499.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          25499.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          25499.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          25499.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          25778.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          25778.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          25778.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          25778.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          25778.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          27951.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          27951.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          27951.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          27951.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          27951.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          28230.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          28230.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          28230.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          28230.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          28230.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          28509
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          28509
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          28509
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          28509
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          28509
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          28787.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          28787.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          28787.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          28787.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          28787.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          29066.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          29066.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          29066.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          29066.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          29066.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22161.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22161.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22161.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22161.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22161.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22440.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22440.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22440.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22440.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22440.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22719
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22719
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22719
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22719
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22719
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22997.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22997.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22997.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22997.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22997.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          23276.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          23276.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          23276.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          23276.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          23276.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4146.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4146.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4146.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4146.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4146.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4425.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4425.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4425.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4425.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4425.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4704
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4704
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4704
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4704
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4704
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4982.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4982.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4982.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4982.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4982.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          5261.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          5261.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          5261.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          5261.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          5261.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1982.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1982.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1982.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1982.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1982.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1703.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1703.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1703.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1703.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1703.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1425
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1425
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1425
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1425
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1425
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1146.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1146.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1146.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1146.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1146.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -867.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -867.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -867.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -867.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -867.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_004",
      "GridRowIndex": 4
    }
  ],
  "Interval_ms": 0,
  "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
  "UserName": "Nikon",
  "Depth": 2,
  "PixelType": "GRAY16",
  "Time": "2019-12-16 05:12:52 -0500",
  "Date": "2019-12-16",
  "z-step_um": 1,
  "MetadataVersion": 10,
  "PositionIndex": 134,
  "SlicesFirst": true,
  "ChContrastMin": [
    0,
    0,
    0,
    0,
    0
  ],
  "Width": 2048,
  "PixelAspect": 1,
  "MicroManagerVersion": "1.4.23 20190321",
  "ROI": [
    0,
    0,
    2048,
    2048
  ],
  "ChNames": [
    "Il-G",
    "Il-T",
    "Il-A",
    "Il-C",
    "P-DIC"
  ],
  "IJType": 1,
  "GridRow": 0,
  "Comment": "",
  "Height": 2048,
  "GridColumn": 0,
  "Prefix": "geneseq_1",
  "PixelSize_um": 0.16,
  "Frames": 1,
  "CameraTimeout": 20000,
  "BitDepth": 16,
  "KeepShutterOpenChannels": false,
  "Source": "Micro-Manager",
  "Channels": 5,
  "ComputerName": "ZadorConfocal1",
  "CustomIntervals_ms": [],
  "KeepShutterOpenSlices": false,
  "ChColors": [
    -13369345,
    -256,
    -52225,
    -1,
    -1
  ],
  "TimeFirst": false,
  "ChContrastMax": [
    65536,
    65536,
    65536,
    65536,
    65536
  ],
  "Positions": 400,
  "Directory": "F:\\20191216M1cdhs"
},
"FrameKey-0-0-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "6fa3dce3-9b1f-482c-ae33-46bbdf325d80",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6629819,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:52 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "bd14fcad-9279-416d-955a-dfa22e7d93ea",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6630096,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:53 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e3d65f75-ba7b-4820-a4f9-cdcee23ff72a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6630374,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:53 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0349cae6-3006-4baa-a472-fa35f9471d91",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6630649,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:53 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b53d434d-3b9e-4dca-8fff-5038f13e980f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6630925,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:53 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "059b0a0f-54d0-4513-8d91-feb3b4e548db",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6631222,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:54 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "cf63983a-0ede-4b37-ae73-a319e5a532c5",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6631498,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:54 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "733ddb91-4376-4373-a6de-7420b2a89b02",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6631772,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:54 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f803edaa-becb-4249-8158-d18582f142b5",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6632049,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:55 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8ce79057-bb30-46c3-bdde-15a29cb0f6f6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6632334,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:55 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "70a6aa3b-2fff-42a0-808a-4596e2957284",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6632612,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:55 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "eb73c001-1a66-49f5-ae32-cacf2945130d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6632887,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:55 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "505e9aac-c9d4-426e-8eba-abe9e24f28c0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6633163,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:56 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "2df84e67-8ec8-47dc-b7b2-d5895c565bae",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6633440,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:56 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "799c2cbf-56be-4f8b-8ff8-694efa19e2ba",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6633715,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:56 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "eb35e6b3-6413-4464-b12c-0935ae329d30",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6634008,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:57 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "939fe1a8-04a3-4af5-856a-d852215bff7c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6634283,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:57 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3dfc4416-2e60-488b-a3fb-b6708f122f29",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6634560,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:57 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d9a1e3f7-f838-4e49-9deb-22e0254852a6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6634836,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:57 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "303105b0-3aba-4e42-8f72-0df4c3e246a6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6635119,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:58 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "779280ef-d4e3-4303-bf8d-366bcd9f28cc",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6635395,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:58 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f77c479c-8b47-4339-b992-91ae97fe3877",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6635670,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:58 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0d7bd69f-2c5d-407c-88e2-b5866ece2034",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6635947,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:59 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4c6a8249-61a7-4d74-8200-0b8f2acf9b66",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6636222,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:59 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "288b2844-4ee1-4ad8-91b0-1903408654aa",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6636497,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:59 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a439c6d3-3250-4393-a7ed-5d99762f2489",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6636773,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:12:59 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "30a4997f-9b50-45df-b782-01f737cc0020",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6637050,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:00 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4ad980ff-38bf-4db9-8140-b9453a3c7ffc",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6637326,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:00 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "203dab70-9838-4049-a7bb-7979aaa6d87f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6637602,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:00 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8c3f5593-38d2-4936-87dc-a38132f2c5e6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6637885,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:00 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "67247177-c384-40f2-a3cc-056aaf5625b1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6638160,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:01 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f6b48188-3389-4ca8-a12c-34d43c3c8145",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6639080,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:02 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d90f40d8-9b89-437f-95dd-fa15d1cd02dc",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6639247,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:02 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b1b76bc5-280d-4934-bf14-a715de55d6c6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6639413,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:02 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "eee07c35-0924-44bd-8c59-b792a8bce578",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6639577,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:02 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7b47f268-6e09-475f-9e3b-677be766c1f5",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6639747,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:02 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b4056460-dc27-4289-8bd0-f0fd9b62577a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6639914,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:02 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "181c86fa-abbb-46a6-b43a-a1262183499b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6640090,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:03 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0be7206c-06d1-47f5-ae9b-7d84b6475c0c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6640258,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:03 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "290aa6a0-50db-4574-ba67-53f82d0a874d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6640425,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:03 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f91947d6-9b2a-4f54-a39d-eddec6dd1deb",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6640591,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:03 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "935100f8-c082-4f20-9536-7d2fbe8b6da2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6640757,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:03 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "73a08f4e-9958-4498-a3cd-53646a07dcb9",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6640922,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:03 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fe9ab007-e794-4b51-89d7-7130348e7ceb",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6641101,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:04 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4a5d814d-e9ff-408c-979a-2c6d6f788f30",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6641266,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:04 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b3f6d627-51ca-4d77-84ef-dccea19ac36b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6641433,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:04 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b5a52ca3-2bfc-4ffc-8846-6b0518c576b7",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6641599,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:04 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "2a0d6276-10a5-48e3-941f-a7032c32cb38",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6641765,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:04 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d8b6ed48-6559-41d6-88f8-b286815cdc8a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6641931,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:04 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7db8e189-a4da-4e1d-93e8-085b00a653f2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6642105,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:05 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "eb3b4b01-b604-4c70-8031-122bc7450828",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6642272,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:05 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d82b250c-c9f5-4835-9c87-ac66671af198",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6642438,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:05 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "28baba14-6604-4423-95e7-67f24af21321",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6642605,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:05 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1e627aac-9e12-49ec-a2c9-856ffe608de9",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6642773,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:05 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e8137ddb-c107-436d-80c5-aec3fc2a9575",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6642943,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:06 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ad95b32b-6874-47de-ba52-b8ffb2c2b45c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6643110,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:06 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c45f09a8-8093-4e83-ba4c-c35f8c93f363",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6643275,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:06 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "97acfb4e-a9a3-402d-9abd-55cb56f9c70d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6643440,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:06 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ff22cae8-934f-4064-8a82-4af7868102bf",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6643607,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:06 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "da100352-a784-4c49-bae8-5911885d5f7f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6643774,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:06 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d2fd6cb3-aeb0-4dcf-ab45-7364ee1aec43",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6643953,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:07 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "12059e0a-2706-4aef-8f5c-d252cf29b472",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6644119,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:07 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "99780f5a-2641-443d-9ac1-d598f45ac7e6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6645081,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:08 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4f4d3fa8-3d49-4424-b753-70992c7f5817",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6645352,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:08 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "73b84cdb-1749-4072-9fb9-5a73de7ce82b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6645621,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:08 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "9442bb5d-1ba7-43ee-9a69-4d16c00e90eb",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6645887,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:08 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "564677ab-c807-479b-9b4f-def4a5c0d636",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6646153,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:09 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c79dbba5-52e2-4b75-9b60-1c35806ea11c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6646422,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:09 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "48869663-fa9f-4832-b458-73d406196687",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6646689,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:09 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a84df2b0-6617-43d5-82e4-dc6b47ba8f3c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6646955,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:10 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "19cbda0d-04dd-40d2-a349-dca676c9b31a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6647221,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:10 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "66934ac3-9d92-475a-9b3b-bdcd6d646794",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6647487,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:10 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "061f5bdc-7b0c-4f47-83d1-aa99132e2b7a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6647753,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:10 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "9d90b05b-4258-4c9f-8fd4-0235a24f229a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6648021,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:11 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ca3fd4cf-ab8b-4f0f-851a-115f56594c46",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6648287,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:11 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5457e6df-0301-426c-8b0e-d897cde078c2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6648566,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:11 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4352285d-d1ab-4ac5-b4de-631d777e9a7e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6648832,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:11 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b9feed1c-c3df-4247-9843-3fd2942f52a4",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6649098,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:12 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7c6b5cc7-d385-4be5-9b78-0845af101b6d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6649375,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:12 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "501401be-7b12-4d6d-82c2-bb1babe3fe7c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6649642,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:12 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b223a3c6-68ab-4059-80db-2fd930cd9751",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6649908,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:12 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "183335cc-9658-4084-8e40-73b9609c6902",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6650175,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:13 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b7e36b7c-865c-4f41-a69f-4cd46335f831",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6650451,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:13 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f9c8ab3a-d443-42b5-a936-3f93dcd70e20",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6650717,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:13 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f66b4da1-64a3-4d9a-b8ed-d11ce0645f96",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6650995,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:14 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "20b4c69a-1ae4-4778-bbeb-4ffd064e00c2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6651259,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:14 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f2c68777-6300-4734-9c5b-7027ddfef498",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6651525,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:14 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "61bbb878-e31e-49af-a1d5-07e45795923d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6651792,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:14 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "dfce5467-18b2-48de-9563-de17fa9d169a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6652058,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:15 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "cdf921d3-a85a-44b6-b27a-0cd786d3ca50",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6652324,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:15 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "68951732-567d-4e02-a8e9-38b75eaadbb0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6652589,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:15 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fcf343bb-7c97-4d81-9e06-5b9d58c6e1e0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6652857,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:15 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a690b684-254a-4ace-9526-f946c908288e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6653125,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:16 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3d222c04-fe53-4ced-b5d7-06b9981d0805",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6653747,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:16 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "93ccf3b9-dbd3-4c00-93c7-4a98174f7b96",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6654082,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:17 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "50845365-9807-45f6-9a73-954ce2e50432",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6654420,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:17 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "70ebd4da-ec7d-45e7-b21a-ea14b04e6396",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6654770,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:17 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "51368f16-7de4-4c38-921c-bd9bad9e1663",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6655108,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:18 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "abbd87f3-5ea6-48ba-a03c-db374b3d82e4",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6655451,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:18 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f6f90110-4ab3-47f6-a6f8-13c0bda3b5ca",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6655788,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:18 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7c2b889a-d1ad-4655-ab3a-dc3921a05308",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6656124,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:19 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3a2268c2-c9a1-4bba-a0ad-a85d48c36f15",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6656459,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:19 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fec720cc-40f7-4f49-b289-cc45bfd8a7e2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6656795,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:19 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b0981956-07e4-4038-ab8e-8efd5131fb0c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6657131,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:20 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e5df1b2d-b136-4d69-a873-7c2097d2109c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6657466,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:20 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b79badad-a43f-4b60-865d-426c341cd742",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6657801,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:20 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4ac0d6c3-1eff-41bb-b390-1ee6196134fa",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6658136,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:21 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "615415ab-bd69-4a12-a197-6154a055e39f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6658473,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:21 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a1b0a558-4e22-4c33-af29-a49fdd0122db",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6658810,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:21 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "db778987-641f-4973-8bc8-ad1eeb55c828",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6659152,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:22 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "cbaa2a85-aa19-4c31-8c58-c42d4eb8d188",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6659489,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:22 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "acd84550-6e2e-4fd0-bfa0-3a5b3c431434",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6659824,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:22 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "be2728f7-c18d-46b9-a844-d7554b83ed56",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6660161,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:23 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ba5b3644-10e1-4f57-bfeb-581ff64ea7cb",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6660497,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:23 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "499fc17d-935b-4c6a-bd79-d283d82a69df",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6660843,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:23 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "24af326f-b0e0-47df-899c-b295b3535e1f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6661180,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:24 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "68b8affe-7c85-46ef-8a38-792dbb725724",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6661516,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:24 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "dca107da-4999-435b-882b-34acef31800f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6661852,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:24 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e51528e1-2b70-4bc2-92e7-abd0e1c3d803",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6662188,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:25 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c1176f25-adcf-4f60-a61e-da187dcf9b02",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6662525,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:25 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "74efd942-4a4d-4040-aa45-2fba1b636d4e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6662860,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:25 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c038c740-3fd2-45e4-bf1f-0a4061f4dbe2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6663197,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:26 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "6d23b520-0451-4b28-bf43-dd39b933e0c1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6663532,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:26 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1b54f29a-dc2f-4ced-a20e-2a28059906ed",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6663869,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:26 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a7c0650c-bc59-48cc-af80-01d981b107b6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6664989,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:28 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b75756b6-431c-429e-a9bc-58f141e8b3b5",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6665404,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:28 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4f1f32b1-ef6e-4e26-8847-e3600028134e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6665836,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:28 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c54088d6-2aab-44a2-b972-a694585028dc",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6666285,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:29 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "91e5470a-ff67-4776-a59a-f7afb2fd2d68",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6666717,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:29 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "9e24887c-5535-418f-b0ae-7b7d382b7014",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6667134,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:30 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4fe729eb-6876-4c50-8197-f3e6f62990e7",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6667564,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:30 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fec7cde6-d9ed-4612-ad5a-c307a953489f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6667997,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:31 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3b4a1b1d-515e-4175-8ed6-1b6611a30127",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6668438,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:31 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "23c697ce-148f-4d45-b200-ed8e0580e879",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6668860,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:31 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "710712a4-60d4-4b30-ad2a-8b3b7eab2e4b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6669307,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:32 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c2c54238-57c4-4a02-af72-643d51065621",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6669755,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:32 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "610a5f6d-b6bb-4980-a833-ac47cc0172ce",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6670171,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:33 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d7e1182b-0eed-495f-a9ad-7a81b592527a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6670588,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:33 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7660df5e-97d1-4c18-bc51-a1cabe14e59a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6671006,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:34 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "dae948c2-4c51-4438-8551-3a43e8f87576",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6671452,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:34 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d3dea020-7e65-42e0-a565-b15b3f52f687",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6671899,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:34 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1a716f82-2349-4786-9b81-cbb3f7a2fd15",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6672333,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:35 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "db4dfdf6-9dcc-4eec-90e2-b057130bd52e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6672774,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:35 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4f0d72e8-ead4-4db0-8969-c83939afb0dd",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6673179,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:36 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "312cf3bb-2d61-43e3-913e-319a9bdffd83",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6673594,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:36 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8ed6f301-57c9-4a14-b302-974a81902fc8",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6674010,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:37 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e70db5ab-5ce7-4f30-b4be-a8a4409338bb",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6674426,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:37 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "73446683-1e2a-4a23-aeaf-edfd0627ab22",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6674843,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:37 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ca580eac-ad25-4bd3-b6d5-3abf45dcfa7b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6675258,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:38 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "00a86195-736d-4d1a-af17-1a553eed88a9",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6675690,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:38 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "23961e22-4671-41ad-88c8-8c898f765724",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6676132,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:39 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "77401d45-d597-4792-8c8b-2c930d644a59",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6676571,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:39 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3897147d-1517-417f-8016-11770344bf24",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6677002,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:40 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "19eb00b6-aebb-49d1-a8d8-efd6aff76ea1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6677434,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:40 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1b1d33ce-a4af-4e4f-b6e0-e4821f695b8c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 134,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 05:12:52 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 134,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 6677867,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos5_004_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 66047.056,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 05:13:40 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": 21749.472,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
}
}